CHARACTERIZATION AND METROLOGY FOR ULSI TECHNOLOGY 2000: International Conference

Characterization and Metrology for ULSI Technology-2000

David G. Seiler, National Institute of Standards and Technology, Semiconductor Electronics Division, Gaithersburg, MD, USA ; Thomas J. Shaffner, National Institute of Standards and Technology, Semiconductor Electronics Division, Gaithersburg, MD, USA ; W. Murray Bullis, SEMI, International Standards, Mountain View, CA, USA ; Robert McDonald, Technology Associates, Monte Sereno, CA, USA ; Alain C. Diebold, University at Albany, College of Nanoscale Science and Engineering, Albany, NY, USA ; Patrick J. Smith, California Institute of Technology, Jet Propulsion Laboratory, Pasadena, CA, USA

Conference Location and Date: Gaithersburg, MD,USA, 26-29 June 2000

Subseries: Materials Physics and Applications

Published February 2001; ISBN 1-56396-967-X, One Volume Print, CD-ROM included; 724 pages; 7 x 10 inches; Hardcover; $185.00

Readership: Researchers, engineers, and technicians in electronics, electrical engineering, chemistry, physics, manufacturing, management, and semiconductor characterization

The worldwide semiconductor community faces increasingly difficult challenges as it moves into the manufacturing of chips with feature sizes approaching 100 nm. Some of the challenges are materials-related, such as transistors with high-k dielectrics and on-chip interconnects made from copper and low-k dielectrics. The magnitude of these challenges demands special attention from those in the metrology and analytical measurements community. Characterization and metrology are key enablers for developing semiconductor process technology and in improving manufacturing. This book summarizes major issues and gives critical reviews of important measurement techniques that are crucial to continue the advances in semiconductor technology. It covers major aspects of the process technology and most characterization techniques for silicon research, including development, manufacturing, and diagnostics. It provides a concise and effective portrayal of industry characterization needs and some of the problems that must be addressed by industry, academia, and government to continue the dramatic progress in semiconductor technology. It also provides a basis for stimulating practical perspectives and new ideas for research and development.

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